Full record for nanomachine n.

Definition a nanotechnological machine
OED requirements antedating 1986
Earliest cite K. E. Drexler 'Engines of Creation'
Comment Added to the OED in June 2003, with an earliest cite from 1986.
Last modified 6 July, 2008

Citations for nanomachine n.

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1990 G. Bear Queen of Angels (1991) i.iv. 20 The resulting flow of electricity through the superconducting material of the wings‥was used by AXIS to dismantle the antimatter drive, reduce it to a fine powder with the aid of nanomachine destructors.
1993 D. Beason & K. J. Anderson Assemblers of Infinity 37 39, I think you'll find these are the most promising nanomachines yet.
1993 P. Anderson Harvest of Stars (1994) 424 At the fringes, robots trundled with their loads from a dome wherein humus was being synthesized, to work it into the rock that nanomachines had reduced to mineral grains.
1994 I. McDonald Necroville (1995) 254 It's the original nanomachine, microprocessors the size of molecules.
1994 S.M. Baxter Ring (1996) xxx. 388, I think they downloaded equipment into there: nanomachines, 'bots of some kind—maybe even some analogue of humans.
1994 Analog Science Fiction & Fact Jan. 83/1 I've heard you work on molecular modifiers. Nanomachines.
1994 Analog Science Fiction & Fact Jan. 94/1 Tailor a nanomachine that can repair Dee-dee's cells.
1996 Interzone Apr. 39/1 When programs became streams of nanomachines, the nanomachines streams of quasi-particles and photons.
1996 Interzone Sept. 18/1 You will be expected to install and supervise various terraforming nanomachines.